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Ion Gun Model 1402

Low Energy Ion Gun

Ion Gun Model 1402

Low Energy Ion Gun

The Nonsequitur Technologies Model 1402 Ion Gun features high beam currents at very low beam energies. It also may be operated at high beam energies (up to 5keV) to provide additional depth profiling and sample cleaning capability. Likely applications would include charge compensation, ion scattering, and studies of ion/solid interactions.

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  • Focusing column optimized for low energy throughput

  • High brightness electron impact source for maximum bulk material removal

  • Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300

  • Continuously variable beam energy up to 5keV

  • Replaceable beam trimming aperture with typical life-time of  > 500 hours

  • Dual filaments provide operational backup with typical filament life-time > 500 hours

  • All UHV compatible and etch resistant materials used in fabrication

  • Differential pumping to minimize main chamber gas loading

  • Operates over the range of inert gas species, Oxygen with optional Thoria filament

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